ST4000-DLX  (Thin Film Thickness Measurement)

Dimensions 500 x 610 x 640 mm
Weight 45Kg
Type Manual
Measuring Sample Size ≤ 8", 12"
Measurement Method Non-contact
Measurement Principle Reflectometer
Features Fast Measurement & Easy Operation
Non-contact & Non-destructive
Superb Repeatability & Reproducibility
Windows Based User-friendly Interface
Print Function of Each View & Data Saving
Stage Size 200mm x 200mm(8"), 300mm x 300mm(12"),
Measurement Range 100Å~ 35㎛(Depends on Film Type))
Spot size 40㎛/20㎛, 4㎛(option)
Measurement Speed 1~2 sec./site
Application Areas All Capability of ST2000 & More Precision Measurement /
Intended for Wafer Measurement & OLED
Option Programmable Auto Z Stage / Reference Sample(K-MAC or KRISS or NIST) /
CCD Camera / Transmittance Module
Focus Coaxial Coarse and Fine Focus Controls
Incident illumination 12v 100W Halogen Lamp

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