| Specifications | |
|---|---|
| Dimensions | 500 x 610 x 640 mm |
| Weight | 45Kg |
| Type | Manual |
| Measuring Sample Size | ≤ 8", 12" |
| Measurement Method | Non-contact |
| Measurement Principle | Reflectometer |
| Features | Fast Measurement & Easy Operation Non-contact & Non-destructive Superb Repeatability & Reproducibility Windows Based User-friendly Interface Print Function of Each View & Data Saving |
| Feature | |
|---|---|
| Stage Size | 200mm x 200mm(8"), 300mm x 300mm(12"), |
| Measurement Range | 100Å~ 35㎛(Depends on Film Type)) |
| Spot size | 40㎛/20㎛, 4㎛(option) |
| Measurement Speed | 1~2 sec./site |
| Application Areas | All Capability of ST2000 & More Precision Measurement / Intended for Wafer Measurement & OLED |
| Option | Programmable Auto Z Stage / Reference Sample(K-MAC or KRISS or NIST) / CCD Camera / Transmittance Module |
| Focus | Coaxial Coarse and Fine Focus Controls |
| Incident illumination | 12v 100W Halogen Lamp |
