Specifications | |
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Dimensions | 1100 x 1250 x 1550 mm |
Weight | 200kg |
Type | Automatic |
Measurement Method | Non-contact |
Measurement Principle | Reflectometer |
Features | Fast Measurement & Easy Operation Non-contact & Non-destructive Superb Repeatability & Reproducibility 2D/3D Mapping & Contouring Automatic Stage Control & Anti-vibration Table CCD Camera Auto Focusing |
Feature | |
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Stage Size | ~300mm x 300mm |
Measurement Range | 100Å~ 50㎛(Depends on Film Type) |
Spot size | 40㎛/20㎛,4㎛(option) |
Measurement Speed | 1~2 sec./site(fitting time) |
Application Areas | All Capability of ST2000 & More Precision Measurement Intended for Large Size Wafer Measurement |
Option | Transmittance Module Reference Sample(K-MAC or KRISS or NIST) |
Revolving nosepiece | Quintuple Revolving Nosepiecs |
Focus | Coaxial Coarse and Fine Focus Controls |
Incident illumination | 12v 100W Halogen Lamp |