ST5000 (Thin Film Thickness Measurement)

Dimensions 1100 x 1250 x 1550 mm
Weight 200kg
Type Automatic
Measurement Method Non-contact
Measurement Principle Reflectometer
Features Fast Measurement & Easy Operation
Non-contact & Non-destructive
Superb Repeatability & Reproducibility
2D/3D Mapping & Contouring
Automatic Stage Control & Anti-vibration Table
CCD Camera
Auto Focusing
Stage Size ~300mm x 300mm
Measurement Range 100Å~ 50㎛(Depends on Film Type)
Spot size 40㎛/20㎛,4㎛(option)
Measurement Speed 1~2 sec./site(fitting time)
Application Areas All Capability of ST2000 & More Precision Measurement
Intended for Large Size Wafer Measurement
Option Transmittance Module
Reference Sample(K-MAC or KRISS or NIST)
Revolving nosepiece Quintuple Revolving Nosepiecs
Focus Coaxial Coarse and Fine Focus Controls
Incident illumination 12v 100W Halogen Lamp

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