| Specifications | |
|---|---|
| Dimensions | 1100 x 1250 x 1550 mm |
| Weight | 200kg |
| Type | Automatic |
| Measurement Method | Non-contact |
| Measurement Principle | Reflectometer |
| Features | Fast Measurement & Easy Operation Non-contact & Non-destructive Superb Repeatability & Reproducibility 2D/3D Mapping & Contouring Automatic Stage Control & Anti-vibration Table CCD Camera Auto Focusing |
| Feature | |
|---|---|
| Stage Size | ~300mm x 300mm |
| Measurement Range | 100Å~ 50㎛(Depends on Film Type) |
| Spot size | 40㎛/20㎛,4㎛(option) |
| Measurement Speed | 1~2 sec./site(fitting time) |
| Application Areas | All Capability of ST2000 & More Precision Measurement Intended for Large Size Wafer Measurement |
| Option | Transmittance Module Reference Sample(K-MAC or KRISS or NIST) |
| Revolving nosepiece | Quintuple Revolving Nosepiecs |
| Focus | Coaxial Coarse and Fine Focus Controls |
| Incident illumination | 12v 100W Halogen Lamp |
