1. General Specification | |
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Principle | 370mm x 470 mm~ |
Auto Focus Method | Region Define Image Contrast Method |
CCD Camera | High Speed 640*480pixels, 256gray level, 200 fps |
Light source | 0.8 ~ 80μm at 50x 4 ~ 400μm at 10x 8 ~ 800μm at 5x |
2. System explanation | |
- Detected position teaching for optical system - Fully automatic & Semi-automatic CD measurement |
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3. S/W UI | |
1. General Specification | |
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Principle | White-light Scanning interferometer |
Measuring Range | Lateral Resolution: 0.7㎛ Vertical Resolution: 0.0001㎛ |
2. Structure of Optic Part | |
1. General Specification | |
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Principle | Ohm's Law |
Measuring Range | 1mΩ ~ 10MΩ (Normal) 10MΩ ~ 1GΩ (High) |
2. Principle Image | |
1. General Specification | |
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Principle | Normal Drop-Shape Analyzing Method (Young-Laplace,Trigonometric Method) |
Drop Control | Automatic Pump by Computer Control |
Angle Range | Automatic Pump by Computer Control |
Resolution | ±2° |
2. Principle Image | |
1. General Specification | |
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Usable Wavelength | 420nm ~ 780nm (Option. 300nm ~ 1100nm) |
Wavelength Resolution | 1.7nm |
Repeatability | ± 0.3% at 550nm |
Resolution | ±2° |
2. Principle | |
1. General Specification | |
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Temperature | Room Temperature |
Measurement Range | 10Mpa ~ 3000Mpa |
2. System explanation | |
- Non Contact Method - Fast Scan Speed - Stable reflection signal |
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3. Principle | |